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Micro Stage MT 53
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Technical Data
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MT 53-10-PM
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Travel |
[mm] |
10 |
Accuracy |
[µm] |
3 |
Repeatability * |
[counts] |
± 2 |
Relative deviation
from straightness/flatness
- over total length |
[µm] |
± 0.5 |
Max. Speed |
[mm/s] |
5 |
Permissible loads |
Fx [N]
Fy [N]
Fz [N] |
5
20
20 |
Weight |
[g] |
app. 100 |
Abbreviations |
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Drive |
DC |
DC motor |
SM |
stepping motor |
PM |
PiezoLEG |
LM |
piezo linear motor |
EDLM |
synchronous ironless linear motor |
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Measurement system |
R |
rotary encoder |
L |
incremental linear encoder |
W |
incremental angular encoder |
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Optional accessories |
MM |
integrated motion controller |
B |
integrated electromagnetic brake |
Additional Information
Micro Stage MT 53
pdf
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