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Micro Stage MT 84
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Technical Data MT84
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-25-PM |
-50-PM |
-25-LM |
-50-LM |
| Travel |
[mm] |
25
|
50 |
25 |
50 |
| Accuracy |
[µm] |
3 (1 on request)
|
3 (1 on request)
|
3 (1 on request)
|
3 (1 on request)
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| Repeatability |
[counts] |
± 2
|
± 2
|
± 6* |
± 6*
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| Backlash |
[µm] |
< 3 |
< 3 |
< 3 |
< 3 |
Relative deviation from
straightness/flatness
- over total length
|
[µm]
|
± 0.5
|
± 0.5
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± 1
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± 2
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Max. speed
|
[mm/s] |
5 |
5 |
250* |
250* |
Max. acceleration
|
[m/s 2 ] |
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|
> 10* |
> 10* |
Permissible loads
|
Fx [N]
Fy [N]
Fz [N] |
5
20
20 |
5
20
20 |
5
20
20 |
5
20
20 |
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| Weight |
[kg] |
0.6 |
0.75 |
0.6 |
0.75 |
| Abbreviations |
| |
Drive |
| DC |
DC motor |
| SM |
stepping motor |
| PM |
PiezoLEG |
| LM |
piezo linear motor |
| EDLM |
synchronous ironless linear motor |
| |
| Measurement system |
| R |
rotary encoder |
| L |
incremental linear encoder |
| W |
incremental angular encoder |
| |
Optional accessories |
| MM |
integrated motion controller |
| B |
integrated electromagnetic brake |
Additional Information
Micro Stage MT 84
pdf
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