Optical metrology

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Miniature translation stage NDS 40 for Nova system

 

 

Miniature translation for open loop applications

 

Description:

  • 11 mm travel
  • integrated electronics, open loop application
  • Step-width about 20 nm
  • Holds position without power
  • Vacuum preparation optionally, electronics not integrated
  • Velocity up to 1.5 mm/s
  • xy combination
  • Works with NOVA controller NC

 

Related controllers :

  • CN 30 motor controller
  • CU 30 motor controller

 

Additional Information

Miniature translation stage NDS 40 for Nova system PDF

 

If you would like more information, please contact us.

 

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