Sensor specifications CAS-30/30
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Polished surfaces |
Unpolished surfaces |
Resolution |
0.05µm |
0.1µm |
Accuracy for a measuring range of 100µm |
±0.2µm |
±0.25µm
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Accuracy over the entire measuring range |
±0.5µm |
±2µm |
Measurement Range |
800µm ±400µm |
600µm ±300µm |
(*)
These parameters relate to standard equipment and can be adapted to all specific applications
Online documentation:
Download the brochure CAS (sensor only)
Download the brochure EHD (Bench for measuring the uniformity of thickness)
Download the brochure WMT (Bench for measuring wafer thickness)
Download the brochure GPM (Bench to characterize large samples)
Link to the website of the company OEG
If you would like more information, please contact us.
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