The accuracy of the standard equipment is 100nm. On request, we can improve 1nm to 10nm! (See brochure below)
A large working distance possible
The profilometer FLATSCAN can be used with a large working distance and has a measuring range in height from boom 70 to 700µm (this value depends on the measuring field).
The interest in relation to interferometry is that it has access at any point in the angle of the surface relative to the optical axis of reference. In addition, samples with radii of curvature of about ten meters can be analyzed with this method (this is not the case in interferometry because the number of fringes is too high).
Download the brochure FlatScan
Deflectometry very high performance
Link to the website of the company OEG
If you would like more information, please contact us.