Lifting stage HT 160

Technical Data
		HT 160-16-LM
Travel	[mm]	16
Accuracy	[µm]	2
Resolution	[nm]	33
Vertical force/displacement ratio		1:3
Relative deviation from straightness/flatness - over total length	[µm]	± 2
Max. speed*	[mm/s]	20
Max. acceleration*	[mm/s 2 ]	200
Permissible loads	Fz [N]	50
Weight	[kg]	4.5

Abbreviations

Drive
DC	DC motor
SM	stepping motor
PM	PiezoLEG
LM	piezo linear motor
EDLM	synchronous ironless linear motor

Measurement system
R	rotary encoder
L	incremental linear encoder
W	incremental angular encoder

Optional accessories
MM	integrated motion controller
B	integrated electromagnetic brake

Additional Information

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