Métrologie optique

Micro & Nanopositionnement

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Micro Stage MT 196

 

 

Technical Data MT196


-100-2LM -200-2LM
Travel [mm] 100
200
Accuracy [µm] 2 2
Repeatability [counts] ± 2
± 2
Relative deviation from
straightness/flatness
- over 10 mm 
- over total length
[µm]
[µm]

± 0.4
± 5
± 1
± 10
Max. speed* [mm/s] 250 250
Max. acceleration* [m/s2] 2 2
Permissible loads
Fx [N]
Fy [N]
Fz [N]
30
100
200
30
100
200
Weight [kg] 4.1 4.7

 

 

Abbreviations
 

Drive

DC DC motor
SM stepping motor
PM PiezoLEG
LM piezo linear motor
EDLM

synchronous ironless linear motor

 
Measurement system
R rotary encoder
L incremental linear encoder
W

incremental angular encoder

 

Optional accessories

MM integrated motion controller
B integrated electromagnetic brake

 

Additional Information

Micro Stage MT 196 pdf

 

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