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Micro Stage MT 84
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Technical Data MT84
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-25-PM
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-50-PM
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-25-LM
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-50-LM
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| Travel |
[mm] |
25
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50 |
25 |
50 |
| Accuracy |
[µm] |
3 (1 on request)
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3 (1 on request)
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3 (1 on request)
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3 (1 on request)
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| Repeatability |
[counts] |
± 2
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± 2
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± 6* |
± 6*
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| Backlash |
[µm] |
< 3 |
< 3 |
< 3 |
< 3 |
Relative deviation from
straightness/flatness
- over total length
|
[µm]
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± 0.5
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± 0.5
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± 1
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± 2
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Max. speed
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[mm/s] |
5 |
5 |
250* |
250* |
Max. acceleration
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[m/s 2 ] |
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> 10* |
> 10* |
Permissible loads
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Fx [N]
Fy [N]
Fz [N] |
5
20
20 |
5
20
20 |
5
20
20 |
5
20
20 |
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| Weight |
[kg] |
0.6 |
0.75 |
0.6 |
0.75 |
| Abbreviations |
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Drive |
| DC |
DC motor |
| SM |
stepping motor |
| PM |
PiezoLEG |
| LM |
piezo linear motor |
| EDLM |
synchronous ironless linear motor |
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| Measurement system |
| R |
rotary encoder |
| L |
incremental linear encoder |
| W |
incremental angular encoder |
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Optional accessories |
| MM |
integrated motion controller |
| B |
integrated electromagnetic brake |
Additional Information
Micro Stage MT 84
pdf
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