Métrologie optique

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Precision linear stage PMT 160-EDLM

 

 

Technical Data PMT 160

 


-050-EDLM -100-EDLM -150-EDLM -200-EDLM -300-EDLM
Travel [mm] 50 100 150 200 300
Accuracy [µm] 10 10 10 10 20
Repeatability [µm] ± 0.5 ± 0.5 ± 0.5 ± 0.5 ± 0.5
Backlash [µm] < 3 Ám < 3 Ám < 3 Ám < 3 Ám < 3 Ám
Relative deviation from
straightness/flatness
- over 10 mm travel
- total travel length


[µm]
[µm]


± 0.2
± 0.5


± 0.4
± 1


± 1
± 1.5


± 1
± 2


± 1
± 4
Max. Speed
[mm/s] 10 10 10 10 10
Max. Accuracy
[m/s2] 0.3 0.3 0.3 0.3 0.3
Permissible load
Fx [N]
Fy [N]
Fz [N]
30
100
200
30
100
200
30
100
200
30
100
200
30
100
200
Weight [kg] 3.7 4.2 4.8 5.2 6.5

 

 

 

Abbreviations
 

Drive

DC DC motor
SM stepping motor
PM PiezoLEG
LM piezo linear motor
EDLM

synchronous ironless linear motor

 
Measurement system
R rotary encoder
L incremental linear encoder
W

incremental angular encoder

 

Optional accessories

MM integrated motion controller
B integrated electromagnetic brake

 

Additional Information

Precision linear stage PMT 160-EDLM pdf

 

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